Semiconductor device and method of fabricating the same

ABSTRACT

A semiconductor device comprises a semiconductor substrate, a semiconductor layer formed above the semiconductor substrate, a plurality of unit cells each having a structure with a gate electrode disposed and formed above the semiconductor layer to have a stripe-like shape and with a source layer and a drain layer formed in the semiconductor layer to have stripe-like shapes respectively, a gate wiring line for mutually connecting together respective gate electrodes of the unit cells, a first main electrode being formed on a dielectric film covering the gate electrodes and the gate wiring line and being in contact with any one of the source layer and the drain layer of each unit cell, an impurity diffusion layer formed in the semiconductor layer to a depth reaching the semiconductor substrate only at part immediately underlying the gate wiring line, the part being selected from part immediately underlying a remaining one of the source layer and the drain layer of each unit cell and part immediately underlying the gate wiring line, the impurity diffusion layer being for permitting extension of the remaining one of the source and drain layers of each unit cell up to the semiconductor substrate, and a second main electrode as formed at a back surface of the semiconductor substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromthe prior Japanese Patent Application No. 2002-265910, filed on Sep. 11,2002, and Japanese Patent Application No. 2003-26033, filed on Feb. 3,2003, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to semiconductor devices with verticallystructured or vertical-access transistors formed on a semiconductorsubstrate, and also relates to a fabrication method thereof,

2. Description of Related Arts

Traditionally, electronic equipment such as personal computers (PCs) andinformation communication apparatus or the like is typically designed toemploy a power supply unit with a DC-to-DC converter built therein. Inrecent years, electronic equipment becomes smaller in size and lower inits drive voltage while its drive current becomes larger, With thistrend, a power supply unit is desired which is capable of efficientlyflowing a large current and also offering the handleabillty of higherfrequencies. Thus it is required that power semiconductor devices foruse in such power supply unit be low in turn-on resistance while at thesame time offering enhanced switching performance at high speeds.

A typical prior known approach to meet the requirements is to useSchottky diodes as rectifier circuit elements in this type of powersupplies. In contrast, a recently popularized approach to enabling flowof a large current at further lower voltages is to employ power metaloxide semiconductor field effect transistors (MOSFETs) as the rectifyingdevices in place of the Schottky diodes. More specifically, for powersupply units, rectifier power MOSFETs are used in addition to switchingpower MOSFETs which switch between an input and output. These powersupplies are generally called synchronous rectifier circuit scheme-typepower supplies in view of the fact that switching operations aregenerally performed while letting rectifying power MOSFETs operate in away synchronized with switching power MOSFETs.

FIG. 29 is an enlarged cross-sectional view of one prior art powerMOSFET (for example, Published Unexamined Japanese Patent ApplicationNos. 2002-158353 and 2002-26321). The power MOSFET of FIG. 29 has asymmetrical structure with a dash-dot line as its boundary. When lookingat part on the left side of this dash-dot line, the structure of thispower MOSFET will be explained as follows. On a semiconductor substrate1001 of heavily-doped p (p⁺) conductivity type, a lightly-doped p (p⁻)type epitaxial layer 1002 is formed. A plurality of unit cells aredisposed and formed in this p⁻-type layer 1002, thereby making up aMOSFET. More specifically, a p-type base layer 1003 is formed in thep⁻-type layer 1002, with an n⁺-type source layer 1004 being formedwithin the p-type base layer 1003 and with an n-type drain layer 1005formed outside the p-type base layer 1003. The n-type drain layer 1005involves an n-type high-resistance drain layer 1005 a and an n⁺-typelow-resistance drain layer 1005 b.

At a p-type layer surface portion between the source layer 1004 and thedrain layer 1005, a gate electrode 1007 is formed with a gate dielectricfilm 1006 interposed therebetween. An electrically shorting electrode1008 is formed, which is in contact with the source layer 1004 andp-type base layer 1003. To connect this “short” electrode 1008 to thesubstrate 1001 with low resistance therebetween, a p⁺-type diffusionlayer 1012 is formed to a depth reaching the substrate 1001. A sourceelectrode 1011 is formed on the bottom or back surface of the substrate1001. The surface on which the gate electrode 1007 is formed is coveredwith an interlayer dielectric film 1009, on which film a drain electrode1010 is formed. The drain electrode 1010 is made up of a first-layermetal 1010 a and a second-layer metal 1010 b. The first metal 1010 a isformed simultaneously during formation of the short electrode 1008 sothat it comes into contact with the n⁺-type drain layer 1005 b. Thesecond metal 1010 b is formed on the interlayer dielectric film 1009.

Additionally, a MOSFET is known which has a reverse structure that isopposite in source electrode and drain electrode positions to the MOSFETshown in FIG. 29 with a silicide layer formed on or above contactportions between the source electrode and the epitaxial layer and alsoabove the gate electrode (as disclosed for example in U.S. Pat. No.6,218,712).

In the vertically structured or “vertical access” MOSFET of FIG. 29, theshort electrode 1008 that electrically shortcircuits together the sourcelayer 1004 and the p-type base layer 1003 is formed on the surface ofepitaxial layer 1002 in order to form the source electrode 1011 on theback surface of the substrate 1001. Additionally the p⁺-type diffusionlayer 1012 is formed to connect this short electrode 1008 to thesubstrate 1001. Since the p⁺-type layer 1012 is a deep diffusion layerto be formed by impurity diffusion for an increased length of timeperiod, it significantly expands in the lateral direction also. However,this p⁺ layer 1012 must be designed so that it does not reach a channelregion. When taking into consideration both the lateral expansion of thep⁺ layer 1012 and the required margin space or clearance with respect tothe channel region, it is a must to enlarge the width of unit cells. Anincrease in unit cell width would result in an increase in area of theMOSPET. When the MOSFET area is limited, the unit cells that can be laidout within the MOSFET decrease in number. This makes it difficult tosufficiently satisfy two trade-off characteristics, that is, low turn-onresistance and high-speed switching performance.

SUMMARY OF THE INVENTION

A semiconductor device in accordance with one aspect of this inventioncomprises a semiconductor substrate, a semiconductor layer formed abovethe semiconductor substrate, a plurality of unit cells each having astructure in which a gate electrode is disposed and formed above thesemiconductor layer to have a stripe-like shape while letting a sourcelayer and a drain layer be formed in the semiconductor layer to havestripe-like shapes respectively, a gate wiring line for mutuallyconnecting together respective gate electrodes of the unit cells, afirst main electrode which is formed on a dielectric film covering thegate electrodes and the gate wiring line and which is in contact withany one of the source layer and the drain layer of each unit cell, animpurity diffusion layer which is formed in the semiconductor layer to adepth reaching the semiconductor substrate only at part immediatelyunderlying the gate wiring line, the part being selected from partimmediately underlying a remaining one of the source layer and the drainlayer of each unit cell and part immediately underlying the gate wiringline, the impurity diffusion layer being for permitting extension of theremaining one of the source and drain layers of each unit cell up to thesemiconductor substrate, and a second main electrode as formed at a backsurface of the semiconductor substrate.

A semiconductor device in accordance with another aspect of thisinvention comprises a semiconductor substrate, a semiconductor layerformed above the semiconductor substrate, a plurality of unit cells eachhaving a structure with a gate electrode disposed and formed above thesemiconductor layer to have a stripe-like shape and with a source layerand a drain layer formed in the semiconductor layer to have stripe-likeshapes respectively, a gate wiring line for mutually connecting togetherrespective gate electrodes of the unit cells, a gate oxide film formedunder the gate electrode, an oxide film formed under the gate wiringline and at the same layer as the gate oxide film to have a thicknessgreater than a thickness of the gate oxide film, the thickness of theoxide film being greater than equal to 40 nm and yet less than 100 nm, afirst main electrode which is formed on a dielectric film covering thegate electrodes and the gate wiring line and which is in contact withany one of the source layer and the drain layer of each unit cell, animpurity diffusion layer of p type as formed in the semiconductor layerat a location immediately beneath the gate wiring line to a depthreaching the semiconductor substrate, for permitting extension of aremaining one of the source and drain layers of each unit cell up to thesemiconductor substrate, another impurity diffusion layer of p type asformed in the semiconductor layer at a location immediately beneath theremaining of the source and drain layers of each unit cell to a depthreaching the semiconductor substrate, for permitting extension of theremaining one of the source and drain layers of each unit cell up to thesemiconductor substrate, and a second main electrode as formed at a backsurface of the semiconductor substrate.

A semiconductor device in accordance with a further aspect of thisinvention comprises a semiconductor substrate having one surface and aremaining surface on the opposite side thereof, a semiconductor layerwhich is formed on the one surface side of the semiconductor substrateand which has a surface, a source layer and a drain layer formed in thesurface of the semiconductor layer so that these are spaced apart fromeach other, a gate electrode formed above a portion of the surface ofthe semiconductor layer between the source layer and the drain layerwith a gate dielectric film interposed therebetween, a base layer whichis formed in the surface of the semiconductor layer and which is inconductivity type from the source layer, a short electrode which isformed above the surface of the semiconductor layer for electricallyshort-circuiting the base layer and the source layer together and whichincludes a metallic compound material of a high-melting-point metal anda semiconductor material of the semiconductor layer, an interlayerdielectric film which is formed above the surface of the semiconductorlayer in such a manner as to cover the gate electrode and the shortelectrode and which has a contact hole formed above the drain layer, adrain electrode which is connected to the drain layer via the contacthole and is formed above the interlayer dielectric film, and a sourceelectrode connected on the remaining surface side of the semiconductorsubstrate.

A method of fabricating a semiconductor device in accordance with theinvention is a fabrication method of a semiconductor device having astructure with an epitaxial layer formed above one surface of asemiconductor substrate, with a gate electrode and a drain electrodeformed over the epitaxial layer, with a source layer and a drain layerand a base layer be formed in a surface of the epitaxial layer, and witha source electrode formed above a remaining surface of the semiconductorsubstrate. The method comprises selectively removing a first interlayerdielectric film formed above the epitaxial layer in such a manner as tocover the gate electrode to thereby form an opening for causing exposureof a region including therein a boundary between the base layer and thesource layer, forming a high-melting-point metal film at an overallsurface of the first interlayer dielectric film including the exposedregion by the opening, applying thermal processing to thehigh-melting-point metal film to thereby form a short electrodeincluding a silicide layer at a location overlying the region includingthe boundary between the base layer and the source layer, removingunreacted part of the high-melting-point metal film, forming a secondinterlayer dielectric film to cover the short electrode and the firstinterlayer dielectric film, selectively removing the second interlayerdielectric film to form a contact hole above the drain layer, andforming the drain electrode above the second interlayer dielectric filmand within the contact hole.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a plan view of main part of a MOSFET inaccordance with an embodiment 1 of this invention.

FIG. 2 is a cross-sectional view of the MOSFET as taken along line I–I′of FIG. 1.

FIG. 3 is a cross-sectional view along line II–II′ of FIG. 1.

FIG. 4 illustrates a plan view of main part of a MOSFET in accordancewith an embodiment 2 of the invention.

FIG. 5 depicts a plan view of main part of a MOSFET in accordance withan embodiment 3 of the invention.

FIG. 6 is a sectional view of a MOSFET in accordance with an embodiment4, which corresponds to FIG. 2.

FIG. 7 is a sectional view of a MOSFET in accordance with an embodiment5, which corresponds to FIG. 2.

FIG. 8 shows a plan view of main part of a MOSFET in accordance with anembodiment 6 of the invention.

FIG. 9 is a sectional view taken along line I–I′ of FIG. 8.

FIG. 10 is a sectional view along line II–II′ of FIG. 8.

FIG. 11 is a plan view of main part of a MOSFET in accordance with amodified example of the embodiment 6.

FIG. 12 is a plan view of main part of a MOSFET in accordance withanother modification of the embodiment 6.

FIG. 13 is a sectional view of a MOSFET in accordance with an embodiment7, which corresponds to FIG. 2.

FIG. 14 is a sectional view of the MOSFET in accordance with theembodiment 7, which corresponds to FIG. 3.

FIG. 15 is a diagram showing a graph demonstrating a with-timedestruction distribution of oxide film thickness.

FIG. 16 is a diagram graphically showing the condition for oxide-filmpenetration during implantation of boron (B).

FIG. 17 is a sectional view of a MOSFET in accordance with amodification of the embodiment 7, which corresponds to FIG. 2.

FIG. 18 is a sectional view of the MOSFET in accordance with themodification of the embodiment 7, which corresponds to FIG. 3.

FIG. 19 illustrates in cross-section a MOSFET in accordance with anembodiment 8.

FIG. 20 depicts in cross-section the MOSFET of FIG. 19 with a wiringelectrode attached thereto.

FIG. 21 is a first process drawing for explanation of a fabricationmethod of the MOSFET in accordance with the embodiment 8.

FIG. 22 is a second process drawing for explanation of the fabricationmethod of the MOSFET in accordance with the embodiment 8.

FIG. 23 is a third process drawing for explanation of the fabricationmethod of the MOSFET in accordance with the embodiment 8.

FIG. 24 shows a cross-section of a MOSFET in accordance with anembodiment 9.

FIG. 25 shows a cross-section of a MOSFET in accordance with anembodiment 10.

FIG. 26 shows a cross-section of a MOSFET in accordance with anembodiment 11.

FIG. 27 is a sectional diagram of a MOSFET in accordance with anembodiment 12, which corresponds to FIG. 2.

FIG. 28 is a sectional diagram of the MOSFET in accordance with theembodiment 12, which corresponds to FIG. 3.

FIG. 29 is a sectional diagram of one prior art MOSFET.

DETAILED DESCRIPTION OF THE INVENTION

Several illustrative embodiments (Embodiments 1 to 12) of this inventionwill be explained with reference to the accompanying drawings below. Aprincipal feature of Embodiments 1–7 lies in provision of aheavily-doped impurity diffusion layer for permitting extension ofeither a source layer or a drain layer up to a silicon substrate,wherein the heavily-doped impurity diffusion layer is formed in anepitaxial layer at a location immediately beneath a gate wiring line toa depth reaching the silicon substrate. In contrast, a main feature ofEmbodiments 8–12 is that a shorting or “short” electrode forelectrically short-circuiting a base layer and source layer together isconstituted from a silicide layer.

Although the embodiments as will be discussed below are directed tovertically structured or “vertical” n-channel MOSFETs, the principles ofthe invention may also be applied similarly to p-channel MOSFETs withrespective parts reversed in conductivity type. Also note that althoughexamples using a silicon substrate will specifically be presented in theembodiments below, other available semiconductive substrates mayalternatively be used, which are made of GaAs, SiC, GaN, SiGe, C andother similar suitable materials.

Embodiment 1

FIG. 1 illustrates an enlarged partial plan view of a vertical-accessMOSFET 100 in accordance with an embodiment 1 of the invention. FIGS. 2and 3 are cross-sectional views of the vertical MOSFET 100 as takenalong lines I–I′ and II–II′ of FIG. 1, respectively. This MOSFET 100 ismanufacturable by use of a wafer having a heavily-doped p (p⁺) typesilicon substrate 1 with high impurity concentration and low resistanceand a lightly-doped p (p⁻) type epitaxial layer 2 of low impurityconcentration and high resistance, which is formed on the p⁺-typesilicon substrate 1. The p⁻-type epitaxial layer 2 has its surface inwhich a great number of unit cells are laid out into a matrix form, witha range indicated by dash-dot lines in FIG. 1 as a unit Cell U.

A more concrete explanation is as follows. A p-type base layer 3 isformed in the p⁻-type epitaxial layer 2. In the cross-section of FIG. 2,the p-type base layer 3 is formed so that a plurality of layer portionsor components are laid out at prespecified intervals or layout pitchesin such a manner that a region in which a drain layer 5 will be formedlater is laterally interposed between adjacent ones of the layercomponents, which will later be continuously coupled together under aregion in which a gate wiring line 15 will be formed later. To let theboth terminate end portions of this p-type base layer 3 in the I–I′cross-section be a channel region, a gate electrode 7 is formed througha gate dielectric film 6. The gate electrode 7 is made up of a greatnumber of stripe portions 7 a which are laid out along the both ends ofthe p-type base layer 3 and a coupling portion 7 b for mutually couplingthese stripe portions 7 a together, thereby arranging a mesh-like planarpattern. Each stripe portion 7 a functions as a substantial or “net”gate electrode. An oxide film 6 a underlying the coupler portion 7 b isthe one that was formed simultaneously during formation of the gatedielectric film (gate oxide film) 6, wherein its thickness is the sameas that of the gate dielectric film 6.

Two neighboring unit cells in a direction perpendicular to the stripeportions 7 a of the gate electrode 7 commonly have or “share” a singlep-type base layer 3. Within this p-type base layer 3, an n-type sourcelayer 4 of each unit cell is formed so that it is self-aligned with thestripe portions 7 a of the gate electrode 7. An n-type drain layer 5 isformed outside the p-type base layer 3. The drain layer 5 is of alightly doped drain (LDD) structure having an n-type high-resistancedrain layer 5 a and an n⁺-type low-resistance drain layer 5 b, which islater formed at a central portion of the layer 5 a.

The gate electrode 7 is covered or coated with an interlayer dielectricfilm 8. On this film 8, an electrically shorting or “short” electrode 9is formed as indicated by dotted lines in FIG. 1. This short electrode 9is made of a first-layer metal and is shared by two neighboring unitcells. The short electrode 9 is in contact, through a contact holedefined in the interlayer dielectric film 8, with two n-type sourcelayers 4 within a p-type base layer 3 and a p-type base layer 3 laidtherebetween. The short electrode 9 functions as the source electrode ofeach unit cell.

In cases where the gate electrode is made of polycrystalline silicon or“poly-silicon,” a back-plated wiring line (gate wiring lead) 15 isformed so that it overlaps the coupler portion 7 b of the gate electrode7 for lowering the electrical resistance of this gate electrode 7. Thegate wiring line 15 is formed of the first-layer metal that is the sameas the short electrode 9 and is contacted with the coupler portion 7 bthrough contact holes which are defined in the interlayer dielectricfilm 8 at predetermined intervals.

A drain electrode 10 is formed over the short electrode 9 and the gatewiring line 15 with an interlayer dielectric film 11 interposed or“sandwiched” therebetween. More specifically, the drain electrode 10 isstructured from contact electrodes 10 a and a main electrode 10 b. Thecontact electrodes 10 a are formed of the first-layer metal same as theshort electrode 9 so that each is contacted with its associative n⁺-typedrain layer 5 b. The main electrode 10 b is formed of a second-layermetal for coupling these contact electrodes 10 a together. The mainelectrode 10 b is prevented from being disposed above the gate wiringline 15. This is aimed at preclusion of formation of any unwantedparasitic capacitance otherwise creatable due to the main electrode 10 band the gate wiring line 15.

A source electrode 14 is formed on the bottom or back surface of thep⁺-type silicon substrate 1. In this embodiment, a p⁺-type diffusionlayer 13 for making low-resistance connection of the short electrode 9to the p⁺-type Si substrate 1 is not formed immediately beneath theshort electrode 9 but is continuously formed immediately beneath thecoupler portion 7 b of gate electrode 7—thus, just below the gate wiringline 15—to a predetermined depth reaching the substrate 1 whileextending along the gate wiring line 15. Accordingly, unlike the priorart of FIG. 29, the short electrode 9 is prevented from being in directcontact with the p⁺-type layer 13. However, the p-type base layer 3 ofeach unit cell with which the short electrode 9 is contacted isintegrally formed in such a way as to continue at part immediatelyunderlying the gate wiring line 15 while letting the p⁺-type layer 13 beformed to overlap the p-type base layer 3 at a location immediatelybeneath this gate wiring line 15. Thus it is possible to connect theshort electrode 9 to the substrate 1 with low electrical resistance.

An operation of the MOSFET 100 arranged in the way stated above is asfollows. This MOSFET operates to turn on when a positive voltage isapplied to the gate electrode 7. At this time, the channel thatunderlies each stripe portion 7 b of the gate electrode 7 invertsresulting in establishment of electrical conduction between the drainelectrode 10 and the short electrode 9. A drain current rushes to flowthrough the p-type base layer 3 in the deep p⁺-type diffusion layer 13immediately underlying the gate wiring line 15 and then flows into thesource electrode 14 through the substrate 1.

According to this embodiment, the deep p⁺-type diffusion layer 13 isformed in an inherently useless or “invalid” region of the MOSFET whichis immediately below the gate wiring line 15, which is selected from thepart immediately underlying the source layer 4 of each unit cell and thepart just beneath the gate wiring line 15. With such an arrangement, itis possible to lay out an increased number of ultra-fine unit cells.Consequently, even when arranging a DC-DC converter circuit by on-chipintegration of multiple MOSFETs, it is possible to reduce the onchipoccupation area thereof.

Embodiment 2

FIG. 4 depicts an enlarged partial plan view of a vertical MOSFET 100 ain accordance with an embodiment 2 of the invention in a waycorresponding to FIG. 1. A difference of it from the Embodiment 1 isthat the source layers 4 of two neighboring unit cells to be formedwithin the p-type base layer 3 are formed to have a ladder-shaped planarpattern made up of stripe portions 4 a extending along the stripeportions 7 a of gate electrode 7 and coupling portions 4 b for couplingthem together at specified layout intervals or pitches. Accordingly, theshort electrode 9's contact with the p-type base layer 3 becomes anopening of the source layer 4 of such ladder-like pattern. The otherarrangements are similar to Embodiment 1.

As previously discussed in conjunction with Embodiment 1, disposing thedeep p⁺-type diffusion layer 13 at the location immediately beneath thegate wiring line 15 makes it possible to lessen the unit cell width ofthe MOSFET. Unfortunately, narrowing the unit cell width in the I–I′cross-section of FIG. 2 would result in a likewise decrease in width ofthe short electrode 9 to be disposed between the two neighboring stripeportions 7 a of the gate electrode 7. This makes it difficult to let theshort electrode 9 come into contact with both the source layer 4 and thebase layer 3. On the other hand, when the source layer 4's width (thewidth of a portion extending in parallel to the gate electrode stripeportions 7 a) is made larger in order to increase the reliability ofcontact of the short electrode 9 with respect to the source layer 4, aportion of the base layer 3 which is immediately beneath the sourcelayer 4 becomes greater in resistance in the lateral direction. This canresult in a decrease in the efficiency of “pump-out” of holes—theseholes are produced by impact ionization near the drain in turn-onevents—toward the short electrode 9, which in turn leads to reduction ofthe capability to withstand against avalanches, called the avalancheratings.

According to this embodiment, it is possible by forming the source layer4 into a ladder-like planar pattern to suppress or minimize an increasein lateral-directional resistance of the base layer 3 while at the sametime permitting the stripe portions 4 a of source layer 4 to staysmaller in width. Thus it is possible to achieve high-reliabilityelectrical contact of the short electrode 9 with the source layer 4while retaining enhanced avalanche ratings.

Embodiment 3

FIG. 5 shows an enlarged partial plan view of a MOSFET 100 b inaccordance with an embodiment 3 in a way corresponding to FIGS. 1 and 4.In this embodiment, the shape of the source layer 4 is arranged to havea combined or “compromised” form of those of Embodiments 1 and 2. Morespecifically, two source layers 4 within a p-type base layer 3 areformed to have a concavo-convex pattern offset structure. In otherwords, the source layers 4 have their pn junction terminate ends whichare of mutually mated comb-shaped patterns. The other arrangements arethe same as those of Embodiment 1.

In this embodiment, designing the source layers 4 to have the offsetstructure makes it possible to acquire and retain any required areas ofthe contacts between the short electrode 9 and source layers 4 and alsobetween the short electrode 9 and p-type base layer 3 even in caseswhere the source layers 4 are less in width. This in turn makes itpossible to further improve the avalanche ratings when compared toEmbodiment 2.

Embodiment 4

FIG. 6 illustrates in cross-section main part of a MOSFET 100 c inaccordance with an embodiment 4 in a way corresponding to FIG. 2. Thisembodiment is similar to Embodiment 1 with an additional feature whichfollows: a shallow p⁺-type diffusion layer 21 is further formed betweentwo neighboring source layers 4 within the p-type base layer 3. Thisdiffusion layer 21 is higher in impurity concentration than p-type baselayer 3. Whereby, the electrical contact properties between the shortelectrode 9 and p-type base layer 3 becomes more excellent. Furthermore,providing this p⁺-type diffusion layer 21 results in a further decreasein resistance of the region spanning from the source of each unit cellup to the deep p⁺-type diffusion layer 13. This makes it possible tofurther lower the turn-on voltage.

Embodiment 5

FIG. 7 depicts in cross-section main part of a MOSFET 100 d inaccordance with an embodiment 5 in a way corresponding to FIG. 2. In theembodiments stated previously, there is shown a specific case where thep-type base layer 3 is fabricated prior to formation of the gateelectrode 7. In contrast, this embodiment 5 shows a case where the gateelectrode 7 is first fabricated and thereafter the p-type base layer 3and source layers 4 are formed by impurity ion implantation with thegate electrode 7 as a mask and double diffusion. Accordingly, both thep-type base layer 3 and the source layers 4 are self-aligned with thegate electrode 7. With such an arrangement, the controllability of thechannel region's width (channel length) is improved causing thethreshold voltage controllability to improve accordingly. Any possiblevariation or irregularity of threshold voltages becomes smaller betweenwafers and/or between product lots.

Embodiment 6

FIG. 8 is an enlarged partial plan view of a MOSFET 200 in accordancewith an embodiment 6, with the source/drain electrodes being madeopposite in up-down relation to the embodiments stated supra. FIGS. 9and 10 are I–I′ and II–II′ cross-sectional views of FIG. 8,respectively. Parts or components corresponding to those of each of theprevious embodiments are designated by the same reference characters,and a detailed explanation thereof is eliminated herein.

A difference of this embodiment from the embodiments discussed above isthat the MOSFET is fabricated using a wafer with an n⁻-type epitaxiallayer 2 a formed on an n⁺-type silicon substrate 1 a. This embodiment issimilar to the above embodiments in that multiple unit cells are formedin the surface of n⁻-type layer 2 a. A source electrode 14 is formed onor above the substrate surface so that this electrode is in contact withn-type source layers 4 and p-type base layers 3. Accordingly, anyelectrode equivalent to the short electrode 9 used in the previousembodiments is absent. A drain electrode 10 is formed on the backsurface of the substrate 1 a.

The drain layer 5 has a low-resistance drain layer 5 b. This layer 5 bis continued with an n⁺-type diffusion layer 22, which is formedimmediately beneath the gate wiring line 15 to extend along the gatewiring line 15 to a depth reaching the substrate 1 a. The low-resistancedrain layer 5 b is connected to the drain electrode 10 through thisn⁺-type diffusion layer 22 and also via the substrate 1 a. The n⁺-typediffusion layer 22 is the one that connects the drain 5 to the drainelectrode 10 on the back face of substrate 1 a and is the same infunctionality to the p⁺-type diffusion layer 13 which is used in each ofthe previous embodiments to connect the source layer(s) 4 to the sourceelectrode 14 on the substrate back surface. And this n⁺-type diffusionlayer 22 is disposed at a location immediately underlying the gatewiring line 15, which is an invalid area of the MOSFET, in a similar wayto a respective one of the previous embodiments, thereby permitting theunit cells to further decrease in size—that is, enablingmicrofabrication of such unit cells.

In this embodiment, no short electrodes are required. Thus it ispossible to organize the metal wiring layers overlying the epitaxiallayer into a single layer, which in turn makes it possible to furtherimprove the on-chip integration density of the unit cells. Anotheradvantage is that the interlayer dielectric film further decreases inthickness, resulting in enhancement of the ability to bury the sourceelectrode 14 in contact holes.

Regarding Embodiment 6, there are modified examples which follow.Embodiment 6 also is similar to the case of Embodiment 1 in that thecontact area of the source electrode 14 with respect to the p-type baselayers 3 and source layers 4 causes problems when the unit cells aremicrofabricated to have ultrafine sizes. Accordingly, similarmodifications become effective which are similar to Embodiment 2 (FIG.4) and Embodiment 3 (FIG. 5) with respect to Embodiment 1. Avertical-access MOSFET 200 a of FIG. 11 is an example with its eachsource layer 4 designed to have a ladder-shaped pattern in a similar wayto the embodiment of FIG. 4. A vertical MOSFET 200 b of FIG. 12 is anexample with its source layer 4 formed into a comb-like pattern in asimilar way to the embodiment of FIG. 5.

It should be noted that although not specifically depicted, it is alsoeffective to form a shallow p⁺-type diffusion layer at a contact portionbetween the source electrode 14 and p-type base layer 3 as in theembodiment of FIG. 6 or alternatively to structurally modify the p-typebase layer 3 and source layer 4 so that these are self-aligned with thegate electrode 7 as in the FIG. 7 embodiment.

Embodiment 7

FIGS. 13 and 14 show cross-sectional structures of a MOSFET 100 e inaccordance with an embodiment 7, which correspond to those shown inFIGS. 2 and 3, respectively. A feature unique to this embodiment is thatan oxide film 18 underlying the gate wiring line 15 (this film 18corresponds to the oxide film 6 a under the gate wiring line 15 of FIG.3 as has been set forth in Embodiment 1) is specifically formed so thatits thickness falls within a prespecified range of 40 to 100 nanometers(nm)—more precisely, greater than or equal to 40 nm and less than 100nm—and at the same time is greater than the thickness of the gatedielectric film (gate oxide film) 6 in FIG. 13. Relatively enlarging theoxide film 18's thickness is devoted to reduction of a parasiticcapacitance between the gate wiring line 15 and the p⁺-type diffusionlayer 13. Additionally the oxide film 18 is formed in the same layer asthe gate dielectric film 6.

An explanation is now given of the thickness of the oxide film 18underlying the gate wiring line 15. First, regarding the thickness ofoxide film 18, a with-time destruction distribution of the oxide filmthickness shown in FIG. 15 has been obtained by reliability testresults. The lateral axis of this graph indicates the thickness of asilicon oxide film, and the longitudinal axis shows the inverse numberof a time at which the silicon oxide film causes destruction. It isapparent from viewing this graph of FIG. 15 that the with-timedestruction distribution is in the tendency of saturation when the oxidefilm thickness exceeds about 40 nm. Thus it is can be seen that thethickness of oxide film 18 is required to measure 40 nm or greater.

In addition, there is shown in FIG. 16 a condition for penetration ofthe oxide film upon implantation of boron (B) ions. The lateral axisindicates the energy of such ions; the longitudinal axis shows thethickness of a silicon oxide film. Ordinarily, the equipment used toperform boron ion implantation is such that the ion energy (accelerationvoltage) is limited at 50 to 60 kilo-electron-volts (KeV). By takingmargins of the energy (acceleration voltage) into consideration alongwith the ion energy limit value, the silicon oxide film is required tohave its thickness less than 100 nm. The boron ion implantation is forfabrication of a P⁺-type diffusion layer 13 beneath the gate wiring line15. Assuming that the thickness of oxide film 18 is less than 100 nm,the implantation that penetrates the oxide film 18 becomes possible,resulting in an increase in the degree of freedom or flexibility of theprocess concerned.

Hence, it can be seen from FIGS. 15 and 16 that when the thickness ofthe oxide film 18 is set at 40 nm or more and yet less than 100 nm, itis possible to ensure the reliability of the oxide film 18 while at thesame time obtaining increased process flexibility.

As apparent from the foregoing, according to the MOSFET 100 e inEmbodiment 7, it is possible to form the oxide film 18 to an appropriatethickness which can withstand the local concentration of an electricfield as created between the gate wiring line 15 and its underlyingP⁺-type diffusion layer 13 during high-temperature continuouscurrent-flow tests with a negative or “minus” bias applied to the gateelectrode. This in turn makes it possible to improve the reliability ofMOSPET 100 e in addition to the effects obtainable in Embodiment 1.

There is a modified example of Embodiment 7, which will be explainedwith reference to FIGS. 17 and 18. These drawings show cross-sectionalviews which correspond to FIGS. 13 and 14 as for the MOSFET 100 e inaccordance with Embodiment 7. In this modification, it is also possibleto form a P⁺-type diffusion layer 13 a (an example of another impuritydiffusion layer of p-type) in the cell section also. In this case, theeffect of microfabrication of the unit cells such as in Embodiment 1 isnot obtained; instead, it is possible to improve the reliability of theMOSFET when compared to the prior art.

Embodiment 8

FIG. 19 shows a cross-sectional view of a MOSFET 300 in accordance withan embodiment 8. Parts or components corresponding to those ofEmbodiment 1 shown in FIG. 2 are denoted by the same referencecharacters, and a detailed explanation thereof is eliminated herein. Theshort electrode 9 as used in any one of the above-stated embodiments wasconstituted from the first-layer metal such as aluminum. In contrast, ashort electrode 9 a of Embodiment 8 is formed of a silicide (one exampleof metallic compound material) layer. This silicide layer is made ofmetal compound material that is a mixture of a high-melting-point metal(Ti, Co, Pt, Mo, W or else) and Si of the p⁻-type epitaxial layer 2. Inthe MOSFET 300, the short electrode 9 a is the silicide layer so that itis possible to form the short electrode 9 a in a self-aligned fashion,which in turn makes it possible to further reduce the MOSFET insize—i.e., enables microfabrication of it. It should be noted that inthe case of utilizing semiconductor material other than Si (such asGaAs, SiC. GaN, SiGe, C or else), a metal compound of the semiconductorother than Si and a high-melting-point metal becomes the material of theshort electrode.

An n-type drift layer 12 is the one that is aimed at achievement of thewithstanding or breakdown voltage required. This layer 12 is formed inthe surface of the p⁻-type epitaxial layer 2 while being spaced apartfrom a source layer 4. The drift layer 12 is formed by shallow doping orimplantation of n-type ions into the p⁻-type layer 2 with the gateelectrode 7 as a mask. Whereby, it is possible to lessen the area of anoverlap between the gate electrode 7 and the drift layer 12 withoutcreating any possible deviation or offset between the gate electrode 7and drift layer 12. Lessening this area enables the gate-to-draincapacitance to decrease accordingly. Thus it is possible to reduce anaccumulated charge amount of the gate, thereby making it possible toshorten a switching time period.

An n⁺-type drain layer 5 is formed in the drift layer 12 while providinga predetermined distance from the gate electrode 7. There is a silicidelayer 17 on a surface of the drain layer 5, wherein the layer 17 isformed simultaneously during fabrication of a short electrode 9 a. Byutilizing a contact hole 19 which is formed in interlayer dielectricfilms 8, 11, a drain electrode 10 is in contact with the drain layer 5through the silicide layer 17. A drain electrode 10 is disposed on theinterlayer dielectric film 11, that is, on one surface side of thesilicon substrate 1. In contrast, a source electrode 14 is disposed onthe opposite surface side of silicon substrate 1 which is on the backside of one surface.

In a p⁻-type layer 2 between the silicon substrate 1 and base layer 3, ap⁺-type diffusion layer 23 is formed, which is deep enough to reachsilicon substrate 1. The presence of such p⁺-type diffusion layer 23permits the short electrode 9 a and silicon substrate 1 to be connectedtogether. As the p⁻-type layer 2 becomes a parasitic source resistancecomponent and also acts as a resistor upon power-up, the p⁺-typediffusion layer 23 is provided to reduce the resistance of the p⁻-typelayer 2.

Referring next to FIG. 20, the MOSFET 300 is connected to more than oneexternal wiring lead (not shown) by bonding the drain electrode 10 to awiring electrode 25 which is attached to the external wiring lead suchas an electrical wire. In the prior art MOSFET shown in FIG. 29, let awiring electrode (not shown) be bonded to a second-layer metal 1010 b ofdrain electrode 1010. In either case, the wiring electrode is connectedby bonding to the drain electrode at part overlying the gate electrode,source layer, drain layer, base layer and short electrode. In the MOSFETof FIG. 29, the wiring electrode is bonded not to the first-layer metal1010 a but to the second-layer metal 1010 b for the reason whichfollows.

For enabling flow of a large current, power MOSFETs are inherently largein cross-sectional area, resulting in a likewise increase in area of thewiring electrode. Accordingly, the drain electrode also must increase inarea. Thus, a need is felt to cover the entire surface of a MOSFET chipwith the drain electrode, by way of example. Since in the MOSFET of FIG.29 both the first-layer metal 1010 a and the short electrode 1008 areformed at a time for purposes of simplification of fabricationprocesses, it is impossible to acquire any necessary area for connectionwith the wiring electrode at the first-layer metal 1010 a. Consequently,the second-layer metal 1010 b is formed causing the wiring electrode tobe attached to the second-layer metal 1010 b.

Accordingly, in the MOSFET of FIG. 29, a technique for fabricating thefirst-layer metal and the second-layer metal—that is, the multilayerwiring technique—becomes necessary. Also required is a technique forplanarization of an interlayer dielectric film 1009 in order to avoidstair step-like surface configurations of the interlayer dielectric film1009 otherwise occurring due to the presence of the short electrode1008. This causes a problem as to an increase in manufacturing processstep number and an increase in production costs. Further, due to theplanarization of the interlayer dielectric film 1009, part of theinterlayer dielectric film 1009 which overlies the short electrode 1008becomes thinner than the remaining part thereof. For this reason, thepart overlying the short electrode 1008 (in particular, portionsadjacent to the corners of short electrode 1008) is readily damageableby shocks due to the application of ultrasonic waves and/or loads duringbonding (for example, cracks can take place at such portions), which inturn causes problems such as a decrease in production yield and adecrease in reliability of the MOSFET.

On the contrary, the MOSFET 300 of Embodiment 8 shown in FIG. 19 isarranged to employ a silicide layer for use as the short electrode 9 a.Thus it is possible to constitute the drain electrode 10 by thefirst-layer metal alone without designing it to have a multilayer wiringstructure of the first-layer metal and the second-layer metal.Additionally, the silicide layer is less in thickness (e.g. smaller thanthe thickness of the interlayer dielectric film 8) so that a step-likesurface configuration or planar irregularity occurring at the interlayerdielectric film 11 that covers the short electrode 9 a stays less.Therefore, any planarization process of the interlayer dielectric film11 is no longer required. As apparent from the foregoing discussion,according to this embodiment, both the multilayer wiring technique andthe planarization technique become unnecessary so that it is possible tolessen the number of fabrication process steps while at the same timereducing manufacturing costs.

In addition, as previously stated, the short electrode 9 a stays less inthickness and any planarization process of the interlayer dielectricfilm 11 is no longer required; thus, part of the interlayer dielectricfilm 11 which overlies the short electrode 9 a hardly becomes thinnerthan the other part thereof. Accordingly, when bonding the wiringelectrode 25 of FIG. 20 to the drain electrode 10, the part overlyingthe short electrode 9 a is free from the risk of damageability, therebyenabling the MOSFET 300 to improve in production yields and inreliability.

A brief explanation will be given of a process included in thefabrication method of the MOSFET 300 in accordance with the embodiment8, which process covers from the formation of the short electrode 9 a upto the formation of the source electrode 14. FIGS. 21 to 23 are processdiagrams each showing a cross-section of a silicon substrate or the likefor explanation of this process.

As shown in FIG. 21, form an interlayer dielectric film 8 (an example ofthe first-layer dielectric film) over a p⁻-type epitaxial layer 2 sothat the film 8 covers a gate electrode 7. The interlayer dielectricfilm 8 is comprised of a silicon oxide film or the like. Then, performphotolithography and etching processes to define openings 27, 29 in thislayer 8. The opening 27 is for exposure of a region which includes theboundary or interface between a base layer 3 and source layer 4. Theopening 29 permits exposure of the region of a drain layer 5. Next, leta Ti film 31 be vapor-deposited by sputtering or else on an entiresurface of the interlayer dielectric film 8, which includes the regionsthus exposed by these openings 27, 29.

As shown in FIG. 22, apply thermal processing to the silicon substrate 1of FIG. 21 at temperatures higher than or equal to 400° C., causing theTi film 31 and the p⁻-type epitaxial layer 2 to react with each other.Whereby, a silicide layer (short electrode 9 a, silicide layer 17) isformed to overlie the region including the boundary between the baselayer 3 and source layer 4 and the region of drain layer 5. A topsurface of the interlayer dielectric film 8 and portions of the Ti film31 on sidewalls of the openings 27, 29 are kept unreacted; thus, removethem by etching. By the process stated above, the short electrode 9 aand the silicide layer 17 are formed in a self-aligned fashion to aprespecified thickness less than or equal to 100 nm.

As shown in FIG. 23, deposit an interlayer dielectric film 11 (anexample of the second-layer dielectric film) by chemical vapordeposition (CVD) for example in such a way as to cover the shortelectrode 9 a and silicide layer 17 plus interlayer dielectric film 8.This film 11 is formed of a silicon oxide film or the like. Thereafter,selectively remove the interlayer dielectric film 11 by photolithographyand etching processes to thereby form on the drain layer 5 a contacthole 19 in such a manner as to expose the silicide layer 17.

And, execute sputtering, for example, to vapor-deposit a metal such asaluminum or else on the interlayer dielectric film 11 and also withinthe contact hole 19, thereby forming the drain electrode 10 of FIG. 19.Next, apply polishing or rubbing treatment to the back surface of thesilicon substrate 1 until this silicon substrate 1 has a predeterminedthickness. Thereafter, vaporize by sputtering a metal (Au, Al, V, Ni, Cuor the like) on this back surface, thus forming the source electrode 14of FIG. 19.

Embodiment 9

FIG. 24 shows a sectional view of a MOSFET 300 a in accordance with anembodiment 9. Parts or components corresponding to those of Embodiment 8shown in FIG. 19 are designated by the same reference numerals, and adetailed explanation thereof is eliminated herein. Although in thisembodiment a silicide layer which constitutes the short electrode 9 a isformed on the source layer 4 and base layer 3 in a similar way toEmbodiment 8, any silicide layer is not formed on the drain layer 5unlike Embodiment 8. Due to this, the drain electrode 10 is in directcontact with the drain layer 5. An effect obtainable thereby will beexplained below.

After having formed the contact hole 19, remove a natural oxide film asformed at the bottom of the contact hole 19; then, form a drainelectrode 10. As the natural oxide film removal method, a reversesputter method is generally employed because of its advantage of lowcosts. However, the MOSFET 300 shown in FIG. 19 is such that the bottomof the contact hole 19 is the suicide layer 17 and is very thin, whichwould result in the silicide layer 17 disappearing due to damages ofsuch reverse sputtering. If the natural oxide film is removed away byuse of an HF-based chemical solution in place of the reverse sputtermethod, then it is possible to prevent such disappearance. However, withthis method, reactive products of water and Si can readily generate atthe bottom of the contact hole 19 at a process step between pure-waterwashing and drying treatment steps after completion of the processingusing chemical liquids. This can cause contact defects and thus requiresexecution of new special processing.

In view of this, in the MOSFET 300 a of this embodiment, no openings areformed on or above the region of drain layer 5 during formation of anopening(s) for silicide layer formation in the interlayer dielectricfilm 8, thereby preventing formation of any silicide layer on the drainlayer 5. With such a scheme, the bottom of the contact hole 19 becomesthe drain layer 5; thus, it becomes possible to remove any natural oxidefilm by reverse sputter methods.

Additionally, in case the drain electrode 10 is made of aluminum, whatis called the spike phenomena will possibly occur—that is, the contactbetween the drain electrode 10 and drain layer 5 is often destroyed as aresult of undesired accommodation of Si residing within the p⁻-typeepitaxial layer 2 into an aluminum film during high-temperature thermalprocessing in the manufacture of the drain electrode 10. To avoid thisrisk, let a barrier metal such as Ti or TiW or else be interposedbetween the drain electrode 10 and the drain layer 5.

Embodiment 10

FIG. 25 shows a sectional view of a MOSFET 300 b in accordance with anembodiment 10. Parts or components corresponding to those of Embodiment8 shown in FIG. 19 are denoted by the same reference numerals, with adetailed explanation thereof eliminated herein. In this embodiment, asilicide layer (silicide layer 33) is formed also on the gate electrode7. Whereby, the gate electrode 7 decreases in wiring resistance, thusenabling enhancement of high-speed switching performance. The silicidelayer 33 is formed simultaneously during formation of the shortelectrode 9 a, by forming an opening on or above the gate electrode 7also when forming the opening for silicide layer formation in theinterlayer dielectric film 8. Thus it becomes possible to reduce thewiring resistance of the gate electrode 7 without having to increase thenumber of manufacturing process steps. Note here that any silicide layeris not formed on the drain layer 5 in a similar way to the MOSFET 300 ashown in FIG. 24.

Embodiment 11

FIG. 26 depicts a sectional view of a MOSFET 300 c in accordance with anembodiment 11. Parts or components corresponding to those of Embodiment8 shown in FIG. 19 are designated by the same reference numerals, and adetailed explanation thereof is eliminated herein. A p⁻-type epitaxiallayer 2 of this embodiment has a trench 35 formed in the base layer 3 sothat a specific portion of the terminate ends of the source layer 4which is on the opposite side to the gate electrode 7 is includedtherein. A short electrode 9 a is formed in the trench to cover itsbottom portion and sidewall portion. A p⁺-type diffusion layer 37 isformed in the p⁻-type epitaxial layer 2 that underlies the trench 35.This layer 37 is higher in impurity concentration than the base layer 3.Layer 37 is an alternative to the p⁺-type diffusion layer 23 shown inFIG. 19. Note that any silicide layer is not formed on or above thedrain layer 5 in a similar way to the MOSFET 300 a shown in FIG. 24.

A fabrication method of the characteristic part of the MOSFET 300 c willbe explained below. First, use photolithography and etching processes toform in the interlayer dielectric film 8 an opening 27 for exposure ofthe region including the boundary between the base layer 3 and sourcelayer 4. With the interlayer dielectric film 8 as a mask, selectivelyremove the p⁻-type epitaxial layer 2 by reactive ion etching (RIE)techniques to thereby form a trench 35. This trench 35 has its depthwhich is between the depth of source layer 4 and the depth of base layer3.

With the interlayer dielectric film 8 as a mask, dope a p-type impurityby ion implantation into the trench 35 to thereby form a shallow p⁺-typediffusion layer 37 in the p⁻-type layer 2. Although the p⁺-typediffusion layer 37 does not reach the silicon substrate 1, this layerfunctions as an impurity diffusion layer for causing the source layer 4to extend up to the silicon substrate 1. This can be said becausethermal processing for formation of the drift layer 12 and base layer 3results in a p-type impurity attempting to outdiffuse or “exude” towardthe p⁻-type layer 2 from the silicon substrate 1 of heavily-doped p (p⁺)conductivity type, causing a portion between the p³⁰-type diffusionlayer 37 and silicon substrate 1 to have p-type conductivity ofrelatively high impurity concentration. As apparent from the foregoingdiscussion, this embodiment is capable of making the p⁺-type diffusionlayer 37 shallower, thereby making it possible to suppress or minimizeunwanted lateral diffusion of the p⁺-type diffusion layer 37. This inturn enables the MOSFET 300 c to further shrink into ultrafine sizes.

Next, after having deposited by sputtering or other similar suitabletechniques a Ti film on an entire surface of the interlayer dielectricfilm 8 in such a manner as to include bottom and sidewall portions ofthe trench 35, form a short electrode 9 a by using a method similar tothat in the embodiment 8 as has been explained in FIG. 22. The shortelectrode 9 a is made up of a silicide layer. Then, deposit by CVDmethods an interlayer dielectric film 11 on the interlayer dielectricfilm 8 so that the trench 35 is buried therein. As this embodiment issuch that any silicide layer is not formed on the drain layer 5, thefollowing process is the same as that of the embodiment 9 shown in FIG.24.

Embodiment 12

FIGS. 27 and 28 show sectional views of a MOSFET 400 in accordance withan embodiment 12. FIG. 27 corresponds to FIG. 2 of the Embodiment 1.FIG. 28 corresponds to FIG. 3 of Embodiment 1. Components correspondingto those of Embodiment 1 are designated by the same reference numerals,with a detailed explanation thereof eliminated herein. This embodimentis a combination of Embodiment 1 and Embodiment 10 of FIG. 25. Morespecifically, it becomes possible to achieve enhanced microfabricationand higher integration density of the unit cells, by forming a p⁺-typediffusion layer 13 at a location immediately beneath the coupler portion7 b of gate electrode 7, which layer 13 is for electrode take-outpurposes. Additionally, the short electrode 9 a is formed of a silicidelayer, with a silicide layer 33 formed on the gate electrode 7 also.Letting the short electrode 9 a be such silicide layer makes it possibleto lessen the manufacturing process step number while at the same timereducing production costs and also enabling the MOSFET 400 to furtherimprove in yields and reliability.

It has been stated that according to the semiconductor deviceincorporating the principles of this invention, it is possible torealize further shrinkage in size of vertically structured transistorsby enabling microfabrication and higher on-chip integration density ofthe unit cells.

While the present invention has been particularly shown and describedwith reference to the embodiments, it will be understood by thoseskilled in the art that various changes in form and detail may be madewithout departing from the spirit, scope, and teachings of theinvention.

1. A semiconductor device comprising: a semiconductor substrate; asemiconductor layer formed above said semiconductor substrate; aplurality of unit cells each having a structure with a gate electrodedisposed and formed above said semiconductor layer to have a stripe-likeshape and with a source layer and a drain layer formed in saidsemiconductor layer to have stripe-like shapes respectively; a gatewiring line for mutually connecting together respective gate electrodesof said unit cells; a first main electrode being formed on a dielectricfilm covering said gate electrodes and said gate wiring line and beingin contact with any one of the source layer and the drain layer of eachsaid unit cell; an impurity diffusion layer formed in said semiconductorlayer to a depth reaching said semiconductor substrate at a partimmediately underlying said gate wiring line and not formed at a partimmediately underlying a remaining one of the source layer and the drainlayer of each said unit cell, said impurity diffusion layer being forpermitting extension of the remaining one of the source and drain layersof each said unit cell up to said semiconductor substrate; and a secondmain electrode as formed at a back surface of said semiconductorsubstrate.
 2. The semiconductor device according to claim 1, whereinsaid semiconductor substrate is a substrate of a first conductivitytype, said semiconductor layer is a first conductivity type layer asepitaxially grown on said semiconductor substrate, each unit cell has afirst conductivity type base layer in which said source layer of asecond conductivity type is formed at a surface of said semiconductorlayer and an electrical short electrode for electricallyshort-circuiting said source layer and said first conductivity type baselayer together, said impurity diffusion layer is a heavily-dopedimpurity diffusion layer of the first conductivity type as continuedwith said first conductivity type base layer, said first main electrodeis a drain electrode in contact with said drain layer, and said secondmain electrode is a source electrode permitting said source layer to beconnected through said short electrode and said heavily-doped impuritydiffusion layer.
 3. The semiconductor device according to claim 2,wherein two neighboring unit cells in a direction perpendicular to thegate electrode have in common a first conductivity type base layer andalso have two source layers formed into stripe shapes along respectivegate electrodes disposed at both edge portions of said firstconductivity type base layer, said short electrode being in contact withsaid two source layers and the first conductivity type base layertherebetween.
 4. The semiconductor device according to claim 2, whereintwo neighboring unit cells in a direction perpendicular to the gateelectrode commonly have a first conductivity type base layer, said twoneighboring unit cells have a source layer of ladder shape patternhaving stripe-shaped portions formed along said respective gateelectrodes and a coupling portion for coupling them together at aspecified interval, and said short electrode is in contact with thissource layer and said first conductivity type base layer which isexposed to an opening of the ladder shape pattern thereof.
 5. Thesemiconductor device according to claim 2, wherein two neighboring unitcells in a direction perpendicular to the gate electrode commonly have afirst conductivity type base layer, said two neighboring unit cells havetwo source layers as formed along said respective gate electrodes tohave mutually mated ladder shape patterns, and said short electrode isin contact with said two source layers and said first conductivity typebase layer therebetween.
 6. The semiconductor device according to claim2, wherein a heavily-doped impurity diffusion layer of the firstconductivity type shallower than said heavily-doped impurity diffusionlayer is formed at a contact portion of said first conductivity typebase layer with said short electrode.
 7. The semiconductor deviceaccording to claim 1, wherein said semiconductor substrate is asubstrate of a first conductivity type, said semiconductor layer is afirst conductivity type semiconductor layer as epitaxially grown on saidsemiconductor substrate, each unit cell has at a surface of saidsemiconductor layer a first conductivity base layer in which said sourcelayer of a second conductivity type is formed, said impurity diffusionlayer is a heavily-doped impurity diffusion layer of the firstconductivity type as continued with said drain layer, said first mainelectrode is a source electrode in contact with said source layer andsaid first conductivity type base layer, and said second main electrodeis a drain electrode with said drain layer connected thereto throughsaid heavily-doped impurity diffusion layer.
 8. The semiconductor deviceaccording to claim 1, further comprising: a gate oxide film formed undersaid gate electrode, an oxide film formed under said gate wiring lineand at the same layer as said gate oxide film, said oxide film havingits thickness greater than a thickness of said gate oxide film, whereinsaid impurity diffusion layer is of p-type.
 9. The semiconductor deviceaccording to claim 8, wherein the thickness of said oxide filmunderlying said gate wiring line is greater than equal to 40 nanometers(nm) and yet less than 100 nm.
 10. A semiconductor device comprising: asemiconductor substrate having one surface and a remaining surface on anopposite side thereof, a semiconductor layer being formed on the onesurface side of said semiconductor substrate and having a surface; asource layer and a drain layer formed in the surface of saidsemiconductor layer so that these are spaced apart from each other; agate electrode formed above a portion of said surface of saidsemiconductor layer between said source layer and said drain layer witha gate dielectric film interposed therebetween; a base layer beingformed in said surface of said semiconductor layer and being thedifferent in conductivity type from said source layer; an electricalshort electrode formed above said surface of said semiconductor layerfor electrically shorting said base layer and said source layertogether, said short electrode including a metallic compound material ofa high-melting-point metal and a semiconductor material of saidsemiconductor layer; a first dielectric film formed in such a manner asto cover said gate electrode and to not cover said electrical shortelectrode; a second dielectric film formed in such a manner as to coversaid electrical short electrode and said first dielectric film; a drainelectrode formed above said second dielectric film; a source electrodeconnected on the remaining surface side of said semiconductor substrate;and a metallic portion having a single layer structure buried in acontact hole through said first and second dielectric films to connectsaid drain layer with said drain electrode, wherein an upper surface ofsaid first dielectric film is positioned higher than that of saidelectrical short electrode.
 11. The semiconductor device according toclaim 10, wherein said short electrode is made of said metallic compoundmaterial.
 12. The semiconductor device according to claim 10, whereinsaid metallic compound material is formed at said drain layer.
 13. Thesemiconductor device according to claim 10, further comprising: a wiringelectrode connected by bonding to said drain electrode at a locationover said gate electrode, said source layer, said drain layer, said baselayer and said short electrode.
 14. The semiconductor device accordingto claim 10, wherein said metallic compound material is formed tooverlie selected ones of said source layer, said base layer and saiddrain layer, said selected ones being said source layer and said baselayer.
 15. The semiconductor device according to claim 10, furthercomprising: another metallic compound material which is a compound of ahigh-melting-point metal and a semiconductor of said gate electrode andis formed over said gate electrode.
 16. The semiconductor deviceaccording to claim 10, wherein said semiconductor layer has a trenchformed in said base layer while permitting inclusion of one of endportions of said source layer, said one being an end portion on anopposite side to said gate electrode, said short electrode is formed insaid trench, and said semiconductor device further comprises a diffusionlayer formed at said semiconductor layer by ion doping from said trenchinto said semiconductor layer, said diffusion layer being the same inconductivity type as said semiconductor layer and higher in impurityconcentration than said semiconductor layer.
 17. The semiconductordevice according to claim 10, further comprising: a plurality of unitcells each having a structure with said gate electrode and said sourcelayer plus said drain layer being disposed and formed to have stripeshapes respectively; a coupling portion formed in a region betweenadjacent ones of said plurality of unit cells for permittinginterconnection between respective gate electrodes of said plurality ofunit cells; and an impurity diffusion layer formed in said semiconductorlayer to a depth reaching said semiconductor substrate at a portionselected from a portion immediately beneath said coupling portion and aportion immediately underlying said source layer of a respective one ofsaid plurality of unit cells, said selected portion is immediatelybeneath said coupling portion, said impurity diffusion layer being forpermitting extension of said source layer of a respective one of saidplurality of unit cells up to said semiconductor substrate and being thesame in conductivity type as said semiconductor layer and higher inimpurity concentration than said semiconductor layer.